A team led by Prof. SUN Haiding from the University of Science and Technology of China (USTC) developed a vertically integrated micro-scale light-emitting diode (micro-LED) array，which was then ...
In the realm of science and technology, harnessing coherent light sources in the deep ultraviolet (DUV) region holds immense significance across various applications such as lithography, defect ...
Tokyo, Japan – Scientists from Tokyo Metropolitan University have developed a new electrode material for deep-ultraviolet (DUV) light-emitting diode applications. They used a cutting-edge deposition ...
Deep ultraviolet (DUV) irradiation is a fast and effective way to inhibit the spread of pathogenic microorganisms, because it can directly destroy the genetic materials of microorganisms or prevent ...
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Chinese scientists create 'breakthrough' solid-state DUV laser light source for chipmaking tools
According to SPIE, researchers from the Chinese Academy of Sciences (CAS) have created a "breakthrough" solid-state deep ultraviolet (DUV) laser emitting coherent 193-nm light used for semiconductor ...
To hedge against growing geopolitical and supply chain risks, Washington and Beijing have utilized industrial policies in recent years to bolster domestic semiconductor manufacturing. Although ...
OYAMA, Japan--(BUSINESS WIRE)--Gigaphoton, Inc. , a major lithography light source manufacturer, announced that the company will begin shipping the GT63A, the next-generation ArF excimer laser for ...
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