Remote plasma cleaning is a proven method used by several electron microscopists to get the most ideal images from their instruments by removing hydrocarbon (HC) contamination 1. The oxygen radicals ...

This method has increased in popularity, overtaking traditional surface cleaning methods due to its capacity to be seamlessly integrated into existing in-line processes without adding time or extra ...

The oxygen radicals produced in the plasma generate CO, CO 2, and H 2 O by reacting with carbon compounds, and these generated byproducts are eliminated from the instrument. As per quantum chemistry ...